Publication Information

Title: Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition

Type: Journal

Info: J. Phys. Chem. C, 2019, 123 (7), pp 4109 - 4115

Date: 2019-01-18

DOI: http://dx.doi.org/10.1021/acs.jpcc.8b12216

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Deposition Temperature = 150C

1907-33-1

7732-18-5

124-38-9

Deposition Temperature Range = 150-200C

1907-33-1

7782-44-7

Deposition Temperature Range = 200-300C

1907-33-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Gas Phase Species

QMS, Quadrupole Mass Spectrometer

Pfeiffer QMS

Substrates

Keywords

Notes

1297



Shortcuts



© 2014-2019 plasma-ald.com