Your search for plasma enhanced atomic layer deposition publications discussing Li2O films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide |
© 2014-2019 plasma-ald.com