
Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
Type:
Journal
Info:
Energies 2020, 13(9), 2345
Date:
2020-05-04
Author Information
Name | Institution |
---|---|
Maxim Yu Maximov | Peter the Great St.Petersburg Polytechnic University |
Denis V. Nazarov | Saint-Petersburg Electrotechnical University |
Aleksandr M. Rumyantsev | Ioffe Institute |
Yury Koshtyal | Peter the Great St.Petersburg Polytechnic University |
Ilya Ezhov | Peter the Great St.Petersburg Polytechnic University |
Ilya Mitrofanov | Peter the Great St.Petersburg Polytechnic University |
Artem Kim | Peter the Great St.Petersburg Polytechnic University |
Oleg Medvedev | Peter the Great St.Petersburg Polytechnic University |
Anatoly A. Popovich | Peter the Great St.Petersburg Polytechnic University |
Films
Plasma LiNiOx
Plasma NiOx
Plasma Li2O
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Substrates
Si(100) |
Stainless Steel 316L |
Notes
1508 |