Publication Information

Title:
Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
Type:
Journal
Info:
Energies 2020, 13(9), 2345
Date:
2020-05-04

Author Information

Name Institution
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovSaint-Petersburg Electrotechnical University
Aleksandr M. RumyantsevIoffe Institute
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Oleg MedvedevPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University

Films


Plasma NiOx


Plasma Li2O


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling

Substrates

Si(100)
Stainless Steel 316L

Keywords

Batteries
Lithium-ion

Notes

1508