Anatoly A. Popovich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anatoly A. Popovich returned 6 record(s).

Number	Title
1	Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
2	Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
3	Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
4	Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
5	Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
6	Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition