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Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries

Type:
Journal
Info:
ECS Meeting - 18th International Meeting on Lithium Batteries
Date:
2016-06-20
DOI:
https://ecs.confex.com/ecs/imlb2016/webprogram/Paper79309.html

Author Information

Name Institution
Pavel A. NovikovPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovPeter the Great St.Petersburg Polytechnic University
Aleksey O. SilinPeter the Great St.Petersburg Polytechnic University
Aleksandr M. RumyantsevIoffe Institute

Films

Plasma SnO2

Hardware used: Picosun SUNALE R-150B
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 250-350C

Thermal SnO2

Hardware used: Picosun SUNALE R-150B
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature Range = 250-350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Tescan Mira

Characteristic: Conductance
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Substrates

Notes

Meeting abstract withdrawn.
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