Aleksey O. Silin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aleksey O. Silin returned 2 record(s).

Number	Title
1	Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
2	Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries