Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Aleksey O. Silin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aleksey O. Silin returned 2 record(s).

NumberTitle
1Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
2Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries