Pavel A. Novikov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pavel A. Novikov returned 2 record(s).

Number	Title
1	Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
2	Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries