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Pavel A. Novikov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pavel A. Novikov returned 2 record(s).

NumberTitle
1Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
2Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries