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Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries

Type:
Journal
Info:
Coatings 2019, 9, 301
Date:
2019-05-01
DOI:
http://dx.doi.org/10.3390/coatings9050301

Author Information

Name Institution
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovSt. Petersburg State University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Aleksander RymyantsevPeter the Great St.Petersburg Polytechnic University
Oleksiy LyutakovInstitute of Chemical Technology
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University

Films

Plasma NiOx

Hardware used: Picosun SUNALE R-150B
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-400C

Plasma NiOx

Hardware used: Picosun SUNALE R-150B
(MeCp)2Ni, Ni(C5H4CH3)2, Bis(methylcyclopentadienyl)nickel(II), 1,1'-Dimethylnickelocene
CAS#: 1293-95-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-400C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Uniformity
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Merlin

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific ESCA LAB 250 XPS Spectrometer

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Adhesion
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Phase Contrast
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Conductivity
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Battery Properties
Analysis: CV, Cyclic Voltammetry
Diagnostic: Custom

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Diagnostic: Custom

Substrates

Si(111)
Stainless Steel 316L

Notes

1529