Publication Information

Title:
Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
Type:
Journal
Info:
J. Phys. Chem. C, 2014, 118(48), pp 27749-27753
Date:
2014-11-06

Author Information

Name Institution
Alexander Campbell KozenUniversity of Maryland
Alexander J PearseUniversity of Maryland
Chuan-Fu LinUniversity of Maryland
Marshall A. SchroederUniversity of Maryland
Malachi NokedUniversity of Maryland
Sang Bok LeeUniversity of Maryland
Gary W. RubloffUniversity of Maryland

Films





Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Silicon

Keywords

Lithium-ion
Batteries
PEALD Film Development
Plasma vs Thermal Comparison

Notes

Ultratech Fiji (PE)ALD Li2O, LiOH, and Li2CO3 for Li-ion battery electrode study.
TEM images in supplemental materieals.
Silicon substrates cleaned with acetone, methanol, IPA, and N2.
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