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Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
Type:
Journal
Info:
J. Phys. Chem. C, 2014, 118(48), pp 27749-27753
Date:
2014-11-06
Author Information
| Name | Institution |
|---|---|
| Alexander Campbell Kozen | University of Maryland |
| Alexander J Pearse | University of Maryland |
| Chuan-Fu Lin | University of Maryland |
| Marshall A. Schroeder | University of Maryland |
| Malachi Noked | University of Maryland |
| Sang Bok Lee | University of Maryland |
| Gary W. Rubloff | University of Maryland |
Films
Thermal Li2O
Plasma Li2O
Thermal LiOH
Plasma Li2CO3
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| Silicon |
Notes
| Ultratech Fiji (PE)ALD Li2O, LiOH, and Li2CO3 for Li-ion battery electrode study. |
| TEM images in supplemental materieals. |
| Silicon substrates cleaned with acetone, methanol, IPA, and N2. |
| 158 |