Alexander Campbell Kozen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Campbell Kozen returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent
2	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
3	Atomic Layer Deposition of the Solid Electrolyte LiPON
4	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
5	Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
6	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
7	Plasma-enhanced atomic layer deposition of titanium vanadium nitride
8	Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
9	Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
10	Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry

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