Alexander Campbell Kozen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Campbell Kozen returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent
2Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
3Atomic Layer Deposition of the Solid Electrolyte LiPON
4Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
5Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
6In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
7Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
8Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
9Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
10Plasma-enhanced atomic layer deposition of titanium vanadium nitride
11Plasma-enhanced atomic layer deposition of vanadium nitride
12Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
13Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
14Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry