Publication Information

Title: Atomic Layer Deposition of the Solid Electrolyte LiPON

Type: Journal

Info: Chem. Mater. 2015, 27, 5324-5331

Date: 2015-07-09

DOI: http://dx.doi.org/10.1021/acs.chemmater.5b01654

Author Information

Name

Institution

University of Maryland

University of Maryland

University of Maryland

University of Maryland

University of Maryland

Films

Deposition Temperature = 250C

1907-33-1

7732-18-5

512-56-1

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000D

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

NT-MDT NTEGRA Spectra

Images

SEM, Scanning Electron Microscopy

Hitachi SU-70

Images

TEM, Transmission Electron Microscope

JEOL 2100

Substrates

Silicon

Stainless Steel

CNTs, Carbon NanoTubes

Keywords

Notes

378



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