Atomic Layer Deposition of the Solid Electrolyte LiPON

Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09
DOI:
http://dx.doi.org/10.1021/acs.chemmater.5b01654

Author Information

Name Institution
Alexander Campbell KozenUniversity of Maryland
Alexander J PearseUniversity of Maryland
Chuan-Fu LinUniversity of Maryland
Malachi NokedUniversity of Maryland
Gary W. RubloffUniversity of Maryland

Films

Other LiPON

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
Where to buy precursor
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000D

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: NT-MDT NTEGRA Spectra

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-70

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100

Substrates

Silicon
Stainless Steel
CNTs, Carbon NanoTubes

Keywords

Notes

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