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Atomic layer epitaxy of germanium
Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
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Atomic Layer Deposition of the Solid Electrolyte LiPON
Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09
Author Information
| Name | Institution |
|---|---|
| Alexander Campbell Kozen | University of Maryland |
| Alexander J Pearse | University of Maryland |
| Chuan-Fu Lin | University of Maryland |
| Malachi Noked | University of Maryland |
| Gary W. Rubloff | University of Maryland |
Films
Other LiPON
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
CAS#: 1907-33-1
CAS#: 7732-18-5
CAS#: 7727-37-9
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| Silicon |
| Stainless Steel |
| CNTs, Carbon NanoTubes |
Keywords
Notes
| 378 |