Publication Information

Title:
Atomic Layer Deposition of the Solid Electrolyte LiPON
Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09

Author Information

Name Institution
Alexander Campbell KozenUniversity of Maryland
Alexander J PearseUniversity of Maryland
Chuan-Fu LinUniversity of Maryland
Malachi NokedUniversity of Maryland
Gary W. RubloffUniversity of Maryland

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Substrates

Silicon
Stainless Steel
CNTs, Carbon NanoTubes

Keywords

Notes

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