Atomic Layer Deposition of the Solid Electrolyte LiPON
Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09
Author Information
| Name | Institution |
|---|---|
| Alexander Campbell Kozen | University of Maryland |
| Alexander J Pearse | University of Maryland |
| Chuan-Fu Lin | University of Maryland |
| Malachi Noked | University of Maryland |
| Gary W. Rubloff | University of Maryland |
Films
Other LiPON
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| Silicon |
| Stainless Steel |
| CNTs, Carbon NanoTubes |
Notes
| 378 |