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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Atomic Layer Deposition of the Solid Electrolyte LiPON
Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09
Author Information
| Name | Institution |
|---|---|
| Alexander Campbell Kozen | University of Maryland |
| Alexander J Pearse | University of Maryland |
| Chuan-Fu Lin | University of Maryland |
| Malachi Noked | University of Maryland |
| Gary W. Rubloff | University of Maryland |
Films
Other LiPON
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
CAS#: 1907-33-1
CAS#: 7732-18-5
CAS#: 7727-37-9
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| Silicon |
| Stainless Steel |
| CNTs, Carbon NanoTubes |
Keywords
Notes
| 378 |