Name

Institution

Alexander Campbell Kozen

University of Maryland

Alexander J Pearse

University of Maryland

Chuan-Fu Lin

University of Maryland

Malachi Noked

University of Maryland

Gary W. Rubloff

University of Maryland

Other LiPON using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 250C

LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC₄H₉

1907-33-1

Water, H₂O

7732-18-5

Trimethyl phosphate, TMP, (MeO)₃PO

512-56-1

Where to buy precursor

Nitrogen, N₂

7727-37-9

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000D

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

NT-MDT NTEGRA Spectra

Images

SEM, Scanning Electron Microscopy

Hitachi SU-70

Images

TEM, Transmission Electron Microscope

JEOL 2100

Silicon

Stainless Steel

CNTs, Carbon NanoTubes

378