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Publication Information
Title:
Atomic Layer Deposition of the Solid Electrolyte LiPON
Type:
Journal
Info:
Chem. Mater. 2015, 27, 5324-5331
Date:
2015-07-09
Author Information
Name | Institution |
---|---|
Alexander Campbell Kozen | University of Maryland |
Alexander J Pearse | University of Maryland |
Chuan-Fu Lin | University of Maryland |
Malachi Noked | University of Maryland |
Gary W. Rubloff | University of Maryland |
Films
Other LiPON
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
CAS#: 1907-33-1
CAS#: 7732-18-5
CAS#: 7727-37-9
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
Silicon |
Stainless Steel |
CNTs, Carbon NanoTubes |
Keywords
Notes
378 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |