Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
Type:
Journal
Info:
ACS Nano, 12, 2018, (5), pp 4286-4294
Date:
2017-04-24
Author Information
| Name | Institution |
|---|---|
| Alexander J Pearse | University of Maryland |
| Thomas Schmitt | University of Maryland |
| Emily Sahadeo | University of Maryland |
| David M. Stewart | University of Maryland |
| Alexander Campbell Kozen | U.S. Naval Research Laboratory |
| Konstantinos Gerasopoulos | The Johns Hopkins University Applied Physics Laboratory |
| A. Alec Talin | Sandia National Laboratories |
| Sang Bok Lee | University of Maryland |
| Gary W. Rubloff | University of Maryland |
| Keith E. Gregorczyk | University of Maryland |
Films
Plasma SnN
Plasma TiN
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Substrates
| LPZ, Lithium PolyphosphaZene |
| SnN |
Notes
| 1132 |