Publication Information

Title: Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry

Type: Journal

Info: ACS Nano, 12, 2018, (5), pp 4286-4294

Date: 2017-04-24

DOI: http://dx.doi.org/10.1021/acsnano.7b08751

Author Information

Name

Institution

University of Maryland

University of Maryland

University of Maryland

University of Maryland

U.S. Naval Research Laboratory

The Johns Hopkins University Applied Physics Laboratory

Sandia National Laboratories

University of Maryland

University of Maryland

University of Maryland

Films

Deposition Temperature = 200C

1066-77-9

7727-37-9

Deposition Temperature = 200C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

SEM, Scanning Electron Microscopy

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Substrates

LPZ, Lithium PolyphosphaZene

SnN

Keywords

Batteries

Notes

1132



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