Publication Information

Title:
Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
Type:
Journal
Info:
ACS Nano, 12, 2018, (5), pp 4286-4294
Date:
2017-04-24

Author Information

Name Institution
Alexander J PearseUniversity of Maryland
Thomas SchmittUniversity of Maryland
Emily SahadeoUniversity of Maryland
David M. StewartUniversity of Maryland
Alexander Campbell KozenU.S. Naval Research Laboratory
Konstantinos GerasopoulosThe Johns Hopkins University Applied Physics Laboratory
A. Alec TalinSandia National Laboratories
Sang Bok LeeUniversity of Maryland
Gary W. RubloffUniversity of Maryland
Keith E. GregorczykUniversity of Maryland

Films



Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

LPZ, Lithium PolyphosphaZene
SnN

Keywords

Batteries

Notes

1132