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Plasma-Assisted ALD of LiPO(N) for Solid State Batteries

Type:
Journal
Info:
Journal of The Electrochemical Society, 166 (6) A1239-A1242 (2019)
Date:
2019-03-27
DOI:
http://dx.doi.org/10.1149/2.1191906jes

Author Information

Name Institution
B. PutEindhoven University of Technology
M. J. MeesIMEC
Norah HornsveldEindhoven University of Technology
S. HollevoetIMEC
A. SepúlvedaIMEC
Philippe M VereeckenIMEC
Erwin (W.M.M.) KesselsEindhoven University of Technology
Mariadriana CreatoreEindhoven University of Technology

Films

Thermal Li3PO4

Hardware used: Oxford Instruments FlexAL
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 200-275C

Other LiPON

Hardware used: Oxford Instruments FlexAL
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
H2O, Water
CAS#: 7732-18-5
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature Range = 100-275C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000U

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Battery Properties
Analysis: Custom
Diagnostic: Custom

Characteristic: Conductivity
Analysis: SIS, Solid-state Impedance Spectroscopy
Diagnostic: HP 4284A LCR

Substrates

TiN
Li4Ti5O12

Notes

1412