Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
Type:
Journal
Info:
Journal of The Electrochemical Society, 166 (6) A1239-A1242 (2019)
Date:
2019-03-27
Author Information
| Name | Institution |
|---|---|
| B. Put | Eindhoven University of Technology |
| M. J. Mees | IMEC |
| Norah Hornsveld | Eindhoven University of Technology |
| S. Hollevoet | IMEC |
| A. Sepúlveda | IMEC |
| Philippe M Vereecken | IMEC |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
| Mariadriana Creatore | Eindhoven University of Technology |
Films
Thermal Li3PO4
Other LiPON
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Battery Properties
Analysis: Custom
Characteristic: Conductivity
Analysis: SIS, Solid-state Impedance Spectroscopy
Substrates
| TiN |
| Li4Ti5O12 |
Notes
| 1412 |