Publication Information

Title:
Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
Type:
Journal
Info:
Journal of The Electrochemical Society, 166 (6) A1239-A1242 (2019)
Date:
2019-03-27

Author Information

Name Institution
B. PutEindhoven University of Technology
M. J. MeesIMEC
Norah HornsveldEindhoven University of Technology
S. HollevoetIMEC
A. SepĂșlvedaIMEC
Philippe M VereeckenIMEC
Erwin (W.M.M.) KesselsEindhoven University of Technology
Mariadriana CreatoreEindhoven University of Technology

Films



Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Battery Properties
Analysis: Custom

Characteristic: Conductivity
Analysis: SIS, Solid-state Impedance Spectroscopy

Substrates

TiN
Li4Ti5O12

Keywords

Batteries

Notes

1412