Norah Hornsveld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Norah Hornsveld returned 5 record(s).

Number	Title
1	Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
2	Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
3	Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
4	Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
5	Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition