Publication Information

Title:
Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
Type:
Conference Proceedings
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 5, N120-N124
Date:
2013-03-08

Author Information

Name Institution
Valentino LongoEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Fred RoozeboomEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Silicon
Si3N4

Keywords

High-k Dielectric Thin Films
DRAM capacitor

Notes

595