Hyper-Sr, bis(tri-isopropylcyclopentadienyl)strontium with 1,2-demthoxy-ethane adduct, Sr(iPr3Cp)2DME, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
2Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
3Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
4Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
5Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
6Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors