Your search for plasma enhanced atomic layer deposition publications authored by Valentino Longo returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma|
|2||Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas|
|3||Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD|
|4||Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices|
|5||Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films|
|6||Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry|
© 2014-2018 plasma-ald.com