Marcel A. Verheijen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marcel A. Verheijen returned 29 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
2Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
3Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
4Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
5Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
6Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
7Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
8Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
9Encapsulation method for atom probe tomography analysis of nanoparticles
10Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
11Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
12Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
13Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
14Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
15Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
16Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
17Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
18Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
19Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
20Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
21Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
22Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
23Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
24Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
25Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
26Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
27On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
28Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
29Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure