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Marcel A. Verheijen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marcel A. Verheijen returned 31 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
2Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
3Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
4Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
5Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
6Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
7Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
8Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
9Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
10Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
11Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
12Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
13Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
14Encapsulation method for atom probe tomography analysis of nanoparticles
15Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
16Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
17Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
18Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
19Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
20Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
21Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
22Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
23Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
24Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
25Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
26Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
27Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
28On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
29Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
30Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
31Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing