Marcel A. Verheijen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marcel A. Verheijen returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
2Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
3Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
4Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
5Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
6Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
7Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
8Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
9Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
10Encapsulation method for atom probe tomography analysis of nanoparticles
11Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
12Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
13Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
14Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
15Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
16Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
17Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
18Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
19Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
20Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization