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Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology

Type:
Journal
Info:
Nanoscale, 2018,10, 8615-8627
Date:
2018-04-17
DOI:
http://dx.doi.org/10.1039/C8NR02339E

Author Information

Name Institution
Akhil SharmaEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Longfei WuEindhoven University of Technology
Saurabh KarwalEindhoven University of Technology
Vincent VandalonEindhoven University of Technology
Harm C. M. KnoopsEindhoven University of Technology
Ravi S. SundaramOxford Instruments
Jan P. HofmannEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology

Films

Plasma MoS2

Hardware used: Oxford Instruments FlexAL
Bis(t-butylimido)bis(dimethylamino)molybdenum
CAS#: 923956-62-1
H2, Hydrogen
CAS#: 1333-74-0
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature Range = 150-450C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000F

Characteristic: Uniformity
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000F

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Renishaw Invia Raman

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: Renishaw Invia Raman

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Sigma

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco Dimension 3100

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: JEOL JEM ARM 200

Characteristic: Electrochemical Performance
Analysis: Electrochemical Analysis
Diagnostic: Metrohm Autolab PGSTAT302

Substrates

SiO2
Glassy Carbon

Notes

1572