2022 Year in Review

August 2023 Stats


The publication database currently has 1692 entries.
210 Films
283 Precursors
78 Dep Hardware Sets
255 Characteristics
94 Theses
5191 Authors

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2021 Year in Review
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Recent Database Additions
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CFx and H fluxes Sub-10-nm ferroelectric Gd-doped HfO2 layers

Jan P. Hofmann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan P. Hofmann returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
2On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
3Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
4Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
5Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications

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