H2S, Hydrogen Sulfide, CAS# 7783-06-4

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
2Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
3Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
4Plasma enhanced atomic layer deposition of gallium sulfide thin films
5Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
6Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
7Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
8Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
9Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
10Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
11Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
12Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
13Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
14WS2 transistors on 300 mm wafers with BEOL compatibility
15Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
16Plasma enhanced atomic layer deposition of aluminum sulfide thin films
17Plasma enhanced atomic layer deposition of zinc sulfide thin films
18Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
19Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
20Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
21Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
22Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
23Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
24New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell