H2S, Hydrogen Sulfide, CAS# 7783-06-4

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
2Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
3Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
4Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
5Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
6Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
7Plasma enhanced atomic layer deposition of gallium sulfide thin films
8Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
9Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
10Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
11Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
12Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
13Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
14Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
15Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
16New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
17Plasma enhanced atomic layer deposition of zinc sulfide thin films
18Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
19Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
20Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
21WS2 transistors on 300 mm wafers with BEOL compatibility
22Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
23Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
24Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
25Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
26New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
27Plasma enhanced atomic layer deposition of aluminum sulfide thin films