H2S, Hydrogen Sulfide, CAS# 7783-06-4

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
2Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
3Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
4Plasma enhanced atomic layer deposition of gallium sulfide thin films
5Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
6Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
7New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
8Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
9Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
10New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
11Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
12Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
13Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
14Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
15Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
16Plasma enhanced atomic layer deposition of zinc sulfide thin films
17Plasma enhanced atomic layer deposition of aluminum sulfide thin films
18Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
19Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
20Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
21Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
22Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
23Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
24WS2 transistors on 300 mm wafers with BEOL compatibility