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Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

Type:
Journal
Info:
Applied Surface Science 459 (2018) 596-605
Date:
2018-07-29
DOI:
https://doi.org/10.1016/j.apsusc.2018.07.210

Author Information

Name Institution
Seungmin YeoYonsei University
Dip K. NandiYeungnam University
R. RahulYeungnam University
Tae Hyun KimYeungnam University
Bonggeun ShongHongik University
Yujin JangKorean Basic Science Institute
Jong-Seong BaeKorean Basic Science Institute
Jeong Woo HanPohang University of Science and Technology (POSTECH)
Soo-Hyun KimYeungnam University
Hyungjun KimYonsei University

Films

Plasma WS2

Hardware used: NCD Technology Lucida MP-100
W(CO)6, tungsten hexacarbonyl, Joppa27TM (Entegris)
CAS#: 14040-11-0
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha+

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai F20

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai F20

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Electrochemical Performance
Analysis: Electrochemical Analysis
Diagnostic: Ivium Technologies Ivium-n-Stat

Characteristic: Battery Properties
Analysis: Electrochemical Analysis
Diagnostic: Famtech SE-18603

Characteristic: Precursor Characterization
Analysis: -
Diagnostic: -

Substrates

SiO2
Stainless Steel
Ni

Notes

Supporting information has useful W(CO)6 thermal stability data.
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