Search 1616 plasma ALD publications by:
W(CO)6, tungsten hexacarbonyl, Joppa27TM (Entegris), CAS# 14040-11-0
Where to buy
|1||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (99.9+%-W) sublimed|
|2||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (<0.1%-Mo)|
|4||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (<0.3%-Mo)|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.