|1||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (<0.3%-Mo)|
|2||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (<0.1%-Mo)|
|3||Strem Chemicals, Inc.||Tungsten carbonyl, 99% (99.9+%-W) sublimed|
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|1||Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM|
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