Your search for plasma enhanced atomic layer deposition publications discussing WS2 films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates|
|2||Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S|
|3||WS2 transistors on 300 mm wafers with BEOL compatibility|
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