November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

WS₂ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing WS₂ films returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Area-Selective Atomic Layer Deposition of Two-Dimensional WS₂ Nanolayers
2	Edge-Site Nanoengineering of WS₂ by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
3	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
4	Low-temperature direct synthesis of high quality WS₂ thin films by plasma-enhanced atomic layer deposition for energy related applications
5	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
6	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S
7	Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS₂ Layers
8	Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS₂ anodes in Na-ion battery
9	WS₂ transistors on 300 mm wafers with BEOL compatibility