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WS2 transistors on 300 mm wafers with BEOL compatibility
Type:
Journal
Info:
2017 47th European Solid-State Device Research Conference (ESSDERC)
Date:
2017-09-11
Author Information
| Name | Institution |
|---|---|
| T. Schram | IMEC |
| Quentin Smets | IMEC |
| Benjamin Groven | IMEC |
| Markus Heyne | IMEC |
| E. Kunnen | IMEC |
| A. Thiam | IMEC |
| K. Devriendt | IMEC |
| Annelies Delabie | IMEC |
| D. Lin | IMEC |
| M. Lux | IMEC |
| D. Chiappe | IMEC |
| Inge Asselberghs | IMEC |
| S. Brus | IMEC |
| Cedric Huyghebaert | IMEC |
| S. Sayan | IMEC |
| A. Juncker | COVENTOR |
| Matty Caymax | IMEC |
| Iuliana Radu | IMEC |
Films
Other WS2
Film/Plasma Properties
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
| Al2O3 |
Notes
| 1150 |