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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Matty Caymax Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matty Caymax returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
2Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
3Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
4Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
5WS2 transistors on 300 mm wafers with BEOL compatibility

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