Annelies Delabie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Annelies Delabie returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
2Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
3Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
4Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
5Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
6Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
7WS2 transistors on 300 mm wafers with BEOL compatibility
8Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S