Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
Type:
Journal
Info:
Chem. Mater. 2017, 29, 2927-2938
Date:
2017-03-07
Author Information
| Name | Institution |
|---|---|
| Benjamin Groven | KU Leuven |
| Markus Heyne | KU Leuven |
| Ankit Nalin Mehta | IMEC |
| Hugo Bender | IMEC |
| Thomas Nuytten | IMEC |
| Johan Meersschaut | IMEC |
| Thierry Conard | IMEC |
| Patrick Verdonck | IMEC |
| Sven Van Elshocht | IMEC |
| Wilfried Vandervorst | IMEC |
| Stefan De Gendt | KU Leuven |
| Marc Heyns | IMEC |
| Iuliana Radu | IMEC |
| Matty Caymax | IMEC |
| Annelies Delabie | KU Leuven |
Films
Other WS2
Film/Plasma Properties
Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Areal Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Substrates
| Al2O3 |
Notes
| 1121 |