Sven Van Elshocht Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Van Elshocht returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
2Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
3Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
4Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
5Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
6Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications