Marc Heyns Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Heyns returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
2Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
3Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
4Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
5Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S