Stefan De Gendt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefan De Gendt returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
2Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
3Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides