Stefan De Gendt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefan De Gendt returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
2Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
3Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents