Quentin Smets Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Quentin Smets returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||WS2 transistors on 300 mm wafers with BEOL compatibility|
|2||Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates|