Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
Type:
Journal
Info:
Chem. Mater. 2022, 34, 7280-7292
Date:
2022-07-21
Author Information
| Name | Institution |
|---|---|
| Miika Mattinen | Eindhoven University of Technology |
| Farzan Gity | Tyndall National Institute, University College Cork |
| Emma Coleman | Tyndall National Institute, University College Cork |
| Joris F. A. Vonk | Eindhoven University of Technology |
| Marcel A. Verheijen | Eindhoven University of Technology |
| Ray Duffy | Tyndall National Institute, University College Cork |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
| Ageeth A. Bol | Eindhoven University of Technology |
Films
Plasma MoS2
Plasma WS2
Plasma TiSx
Thermal TiSx
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Carrier Concentration
Analysis: Hall effect/van der Pauw method
Characteristic: Mobility
Analysis: Hall effect/van der Pauw method
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| SiO2 |
| Quartz |
| PET, Polyethylene Terephthalate |
| Al2O3 |
Notes
| 1744 |