MoS2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing MoS2 films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
2Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
3Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition