Your search for plasma enhanced atomic layer deposition publications discussing MoS2 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition|
|2||Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition|
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