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2024 Year in Review


The publication database currently has 1748 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
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99 Theses
5407 Authors

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Yujin Jang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yujin Jang returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
2Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
3Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
4Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier

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