Publication Information

Title:
New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 36, 061510 (2018)
Date:
2018-10-02

Author Information

Name Institution
Cathy BugotInstitut Photovoltaïque Ile de France (IPVF)
Muriel BouttemyInstitut Photovoltaïque Ile de France (IPVF)
Nathanaëlle SchneiderInstitut Photovoltaïque Ile de France (IPVF)
Arnaud EtcheberryInstitut Photovoltaïque Ile de France (IPVF)
Daniel LincotInstitut Photovoltaïque Ile de France (IPVF)
Frédérique DonsantiInstitut Photovoltaïque Ile de France (IPVF)

Films

Thermal In2S3


Other In2(S,O)3


Film/Plasma Properties

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Gas Phase Species
Analysis: QMS, Quadrupole Mass Spectrometer

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

BSG, BoroSilicate Glass
Si(100)

Keywords

Solar

Notes

1429