Arnaud Etcheberry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Arnaud Etcheberry returned 2 record(s).

Number	Title
1	New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se₂ thin film solar cell
2	Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO₂/Al₂O₃ stack for silicon solar cells surface passivation