In₂S₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In₂S₃ films returned 2 record(s).

Number	Title
1	Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
2	New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se₂ thin film solar cell

In2S3 Plasma Enhanced Atomic Layer Deposition Film Publications