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H2S, Hydrogen Sulfide, CAS# 7783-06-4

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 27 record(s).

NumberTitle
1Plasma enhanced atomic layer deposition of gallium sulfide thin films
2New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
3Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
4WS2 transistors on 300 mm wafers with BEOL compatibility
5Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
6Plasma enhanced atomic layer deposition of zinc sulfide thin films
7Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
8Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
9Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery
10Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
11Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
12Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
13Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
14Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
15Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
16Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
17Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
18Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
19New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
20Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
21Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
22Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
23Plasma enhanced atomic layer deposition of aluminum sulfide thin films
24Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
25Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
26Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
27Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement