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Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution

Type:
Journal
Info:
Chem. Mater. 2019, 31, 5104-5115
Date:
2019-06-24
DOI:
http://dx.doi.org/10.1021/acs.chemmater.9b01008

Author Information

Name Institution
Shashank BalasubramanyamEindhoven University of Technology
Mahdi ShiraziEindhoven University of Technology
Matthew A. BloodgoodEindhoven University of Technology
Longfei WuEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Vincent VandalonEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Jan P. HofmannEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology

Films

Plasma WS2

Hardware used: Oxford Instruments FlexAL
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 300C

Plasma WS2

Hardware used: Oxford Instruments FlexAL
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
H2, Hydrogen
CAS#: 1333-74-0
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific KA1066 spectrometer

Characteristic: Microstructure
Analysis: HAADF, High-Angle Annular Dark Field
Diagnostic: JEOL JEM ARM 200

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Sigma

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: Ocean Optics UBS 4000-UV-VIS

Characteristic: Electrochemical Performance
Analysis: Linear Sweep Voltammetry
Diagnostic: Custom

Substrates

SiO2
Glassy Carbon

Notes

1530