Marcel A. Verheijen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marcel A. Verheijen returned 31 record(s).

Number	Title
1	Plasma-assisted atomic layer deposition of HfN_x: Tailoring the film properties by the plasma gas composition
2	On the Contact Optimization of ALD-Based MoS₂ FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
3	Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS₂ FETs
4	Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
5	Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
6	Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
7	Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
8	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
9	Large area, patterned growth of 2D MoS₂ and lateral MoS₂-WS₂ heterostructures for nano- and opto-electronic applications
10	Plasma-Assisted ALD of Highly Conductive HfN_x: On the Effect of Energetic Ions on Film Microstructure
11	Low resistivity HfN_x grown by plasma-assisted ALD with external rf substrate biasing
12	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)₂ and H₂ and O₂ Plasmas
13	Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS₂: large area, thickness control and tuneable morphology
14	Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS₂ Layers
15	Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
16	Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al₂O₃ with PO_x Interlayer
17	Encapsulation method for atom probe tomography analysis of nanoparticles
18	Controlling transition metal atomic ordering in two-dimensional Mo_1-xW_xS₂ alloys
19	Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co₃O₄ and Co₃O₄/Fe₂O₃ catalyst films
20	Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
21	Area-Selective Atomic Layer Deposition of Two-Dimensional WS₂ Nanolayers
22	Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO₂
23	Edge-Site Nanoengineering of WS₂ by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
24	Controlling the fixed charge and passivation properties of Si(100)/Al₂O₃ interfaces using ultrathin SiO₂ interlayers synthesized by atomic layer deposition
25	Uniform Atomic Layer Deposition of Al₂O₃ on Graphene by Reversible Hydrogen Plasma Functionalization
26	Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO₂ as an Electron Transport Layer in Planar Perovskite Solar Cells
27	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
28	Crystallization Study by Transmission Electron Microscopy of SrTiO₃ Thin Films Prepared by Plasma-Assisted ALD
29	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
30	Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
31	Atomic layer deposition of HfO₂ using HfCp(NMe₂)₃ and O₂ plasma

Inductively coupled plasma sources from Plasma ALD, LLC.

Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.

Contact us for more information.

Marcel A. Verheijen Plasma Enhanced Atomic Layer Deposition Film Publications