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Atomic layer deposition of high-mobility hydrogen-doped zinc oxide

Type:
Journal
Info:
Solar Energy Materials and Solar Cells, Volume 173, 2017, Pages 111 - 119
Date:
2017-05-17
DOI:
https://doi.org/10.1016/j.solmat.2017.05.040

Author Information

Name Institution
Bart MaccoEindhoven University of Technology
Harm C. M. KnoopsEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
W. BeyerForschungszentrum Jülich
Mariadriana CreatoreEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Thermal ZnO

Hardware used: Oxford Instruments OpAL
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 200C

Other H:ZnO

Hardware used: Oxford Instruments OpAL
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000D

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5300

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5300

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5300

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: NT-MDT Solver P47SPM

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: JEOL JEM ARM 200

Characteristic: Thermal Effusion
Analysis: QMS, Quadrupole Mass Spectrometer
Diagnostic: Custom

Substrates

ZnO

Notes

Supplement contains ZnO etch data and nice table of experimental results https://ars.els-cdn.com/content/image/1-s2.0-S0927024817302593-mmc1.pdf
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