Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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DEZ, diethyl zinc, ZnEt2, CAS# 557-20-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 78 record(s).

NumberTitle
1Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
2A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
3ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
4Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
5Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
6ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
7Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
8Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
9Plasma-enhanced atomic layer deposition of zinc phosphate
10Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
11Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
12The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
13Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
14The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
15Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
16Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
17Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
18Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
19Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
20Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
21Encapsulation method for atom probe tomography analysis of nanoparticles
22P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
23Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
24Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
25Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
26Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
27Plasma enhanced atomic layer deposition of zinc sulfide thin films
28Fast PEALD ZnO Thin-Film Transistor Circuits
29Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
30Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
31Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
32The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
33Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
34Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
35Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
36P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
37Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
38Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
39Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
40Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
41Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
42Spectroscopy and control of near-surface defects in conductive thin film ZnO
43Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
44Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
45The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
46Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
47The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
48Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
49Low-Power Double-Gate ZnO TFT Active Rectifier
50Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
51Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
52Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
53New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
54Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
55Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
56Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
57Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
58Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
59The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
60Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
61Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
62All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
63P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
64Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
65Fast Flexible Plastic Substrate ZnO Circuits
66Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
67Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
68Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
69P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
70Top-down fabricated ZnO nanowire transistors for application in biosensors
71Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
72Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
73Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
74Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
75Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
76Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
77Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
78Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition