Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

DEZ, diethyl zinc, ZnEt2, CAS# 557-20-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 78 record(s).

NumberTitle
1The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
2Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
3P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
4Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
5Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
6Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
7Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
8Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
9Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
10Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
11Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
12Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
13Fast PEALD ZnO Thin-Film Transistor Circuits
14Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
15The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
16Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
17The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
18Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
19P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
20Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
21The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
22Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
23Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
24Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
25Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
26Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
27Spectroscopy and control of near-surface defects in conductive thin film ZnO
28Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
29Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
30Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
31Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
32Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
33Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
34Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
35Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
36ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
37All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
38Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
39Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
40P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
41Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
42Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
43Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
44Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
45Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
46Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
47The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
48Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
49Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
50Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
51Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
52Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
53Plasma-enhanced atomic layer deposition of zinc phosphate
54Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
55Encapsulation method for atom probe tomography analysis of nanoparticles
56Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
57P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
58Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
59Plasma enhanced atomic layer deposition of zinc sulfide thin films
60Top-down fabricated ZnO nanowire transistors for application in biosensors
61Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
62Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
63Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
64Fast Flexible Plastic Substrate ZnO Circuits
65Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
66Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
67New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
68A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
69ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
70Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
71Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
72Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
73Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
74Low-Power Double-Gate ZnO TFT Active Rectifier
75The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
76Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
77Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
78Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition