Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 34, 050605 (2016)
Date:
2016-08-17
Author Information
| Name | Institution |
|---|---|
| Triratna Muneshwar | University of Alberta |
| Gem Shoute | University of Alberta |
| Douglas W. Barlage | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
Films
Plasma ZnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| Si(100) |
Notes
| 896 |