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Kurt J Lesker ALD-150LX Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Kurt J Lesker ALD-150LX hardware returned 22 records.

NumberTitle
1Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
2AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
3Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
4Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
5Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
6Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
7Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
8Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
9Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices
10Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
11High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
12Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
13Atomic Layer Deposition of Nanolayered Carbon Films
14Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
15Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
16Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
17Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
18Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
19Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
20A route to low temperature growth of single crystal GaN on sapphire
21Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
22Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition