Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
Type:
Conference Proceedings
Info:
2016 IEEE International Conference on Plasma Science (ICOPS)
Date:
2016-06-13
Author Information
| Name | Institution |
|---|---|
| Mei Shen | University of Alberta |
| Triratna Muneshwar | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
| Ying Yin Tsui | University of Alberta |
| Douglas W. Barlage | University of Alberta |
| Triratna Muneshwar | University of Alberta |
Films
Plasma ZnO
Film/Plasma Properties
Substrates
Notes
| 960 |