Douglas W. Barlage Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Douglas W. Barlage returned 12 record(s).

Number	Title
1	Impact of Post Fabrication Annealing PEALD ZrO₂ for GaN MOSFETs
2	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
3	Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
4	ZrO₂ on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
5	Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
6	Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
7	Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
8	Electrical Comparison of HfO₂ and ZrO₂ Gate Dielectrics on GaN
9	High Mobility (210cm²/Vs), High Capacitance (7.2uF/cm²) ZrO₂ on GaN Metal Oxide Semiconductor Capacitor via ALD
10	Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
11	Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
12	Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current