Kenneth C. Cadien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenneth C. Cadien returned 26 record(s).

Number	Title
1	ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
2	High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
3	Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
4	Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
5	Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
6	Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
7	In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
8	Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
9	Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
10	Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
11	Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
12	Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
13	XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
14	AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
15	AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
16	Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
17	Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
18	Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
19	Structural and optical characterization of low-temperature ALD crystalline AlN
20	Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
21	Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
22	Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
23	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
24	Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
25	Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
26	A route to low temperature growth of single crystal GaN on sapphire