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Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (29), pp 24722-24730
Date:
2017-07-03
DOI:
http://dx.doi.org/10.1021/acsami.7b05571

Author Information

Name Institution
Pouyan MotamediNational Institute for Nanotechnology, Alberta, Canada
Ken BosnickNational Institute for Nanotechnology, Alberta, Canada
Kai CuiNational Institute for Nanotechnology, Alberta, Canada
Kenneth C. CadienUniversity of Alberta
James David HoganUniversity of Alberta

Films

Plasma Ni

Hardware used: Kurt J Lesker ALD-150L
Bis(ethylcyclopentadienyl)nickel, (EtCp)2Ni
CAS#: 31886-51-8
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 200-360C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000DI

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VASE

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VASE

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Lucas Labs 302

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco Dimension 3100

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2200FS

Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Diagnostic: JEOL 2200FS

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Hitachi H9500

Characteristic: Images
Analysis: HAADF, High-Angle Annular Dark Field
Diagnostic: JEOL 2200FS

Substrates

Sapphire

Notes

1051