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Kurt J Lesker ALD-150L Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Kurt J Lesker ALD-150L hardware returned 15 records.

NumberTitle
1XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
2Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
3ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
4Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
5Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
6Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
7Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
8In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
9Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
10Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
11AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
12Structural and optical characterization of low-temperature ALD crystalline AlN
13Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
14Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
15Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics